Principles of Growth and Processing of Semiconductors
- ISBN-10
- 0070396051
- ISBN-13
- 9780070396050
- Category
- Technology & Engineering / Metallurgy
- Pages
- 512
- Language
- English
- Published
- 1999
- Publisher
- WCB/McGraw-Hill
- Authors
- Subhash Mahajan, K. S. SreeHarsha, K. S. Sree Harsha
Description
A senior/graduate text on the growth and processing of semiconductor materials (semiconductor fabrication) that will expose material/electrical and chemical engineering majors to the principles underlying the fabrication of state-of-the-art integrated circuits and their applications.
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