SEM Microcharacterization of Semiconductors
- ISBN-10
- 0123538556
- ISBN-13
- 9780123538550
- Category
- Technology & Engineering / Electronics / Microelectronics
- Pages
- 452
- Language
- English
- Published
- 1989-01-28
- Publisher
- Elsevier Science
- Authors
- D. B. Holt, D. C. Joy
Description
Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron beam instruments and the second deals with the interpretation of the information obtained in the main operating modes of a scanning electron microscope.
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