Fundamentals of Semiconductor Manufacturing and Process Control
- ISBN-10
- 0471790273
- ISBN-13
- 9780471790273
- Category
- Technology & Engineering
- Pages
- 428
- Language
- English
- Published
- 2006-05-26
- Publisher
- John Wiley & Sons
- Authors
- Gary S. May, Costas J. Spanos
Description
A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.
Get the book
Similar books
-
Animal Sciences: The Biology, Care, and Production of Domestic Animals, Fourth Edition
By John R. Campbell, M. Douglas Kenealy, Karen L. CampbellTimberlake claimed in 1980 that a fundamental problem with Singer's work is the lack of an adequate definition of suffering ...
-
Resilient Agriculture: Cultivating Food Systems for a Changing Climate
By Laura Lengnick3. D. Layne. 2013. Tree Fruit: Protecting Your Investment. American/Western Fruit Grower, September/October. 4. R. Snyder and J. Melu-Abreu. 2005. Frost ...
-
Biodesign: The Process of Innovating Medical Technologies
By Stefanos Zenios, Josh Makower, Paul YockAt that time, these were in the low $10s of millions. ... be a good partner going forward, even though it takes longer to get the deal done," offered Chess.
-
Advanced Signal Processing: A Concise Guide
By Amir-Homayoon Najmi, Todd Moon[ 59 ] S. Kotz , T. J. Kozubowski , and K. Podgorski , The Laplace ... valued signal processing : The proper way to deal with impropriety , ” IEEE Trans .
-
Resources for Technical Communication
By Pearson Education, Pearson Education Staff, David P Pearson EducationSome documents are annotated; some are left without annotations to provide more flexibility for instructors. This booklet can be packaged at no additional cost with any Longman title in technical communication.
-
Chemistry: An Introduction to General, Organic, and Biological Chemistry; Chemistry Study Pack Version 2.0 CD-ROM; The Chemistry of Life CD-ROM;...
By Karen C. TimberlakeChemistry: An Introduction to General, Organic, and Biological Chemistry; Chemistry Study Pack Version 2.0 CD-ROM; The Chemistry of Life CD-ROM;...
-
Poultry Science: Fifth Edition
By Colin G. Scanes, Karen D. ChristensenThe emission rates for ammonia (Casey et al., 2006): • Layers: 116 g NH3 per AU (AU or animal unit or 500 kg). • Broilers: 135 g NH3 per AU (AU or animal unit or 500 kg). Emission rates in different reports vary from less than either 10 ...
-
Solid State Materials Chemistry
By Patrick M. Woodward, Pavel Karen, John S. O. Evans[45] B.F. Hoskins, R. Robson, “Design and construction of a new class of scaffolding-like materials comprising infinite polymeric frameworks of 3D-linked molecular rods. A reappraisal of the zinc cyanide and cadmium cyanide structures ...
-
Abbreviations Dictionary
By Dean A. Stahl, Karen Landen... Tallest Mountain Mount Robson—12,972 feet or 3,954 meters—in the Canadian Rockies Canada's Westernmost City Dawson, Yukon Canada's Westernmost Point in Yukon Territory just east of Alaska's Demarcation Point Canary Islands' Largest ...
-
Agriculture: A Very Short Introduction
By Paul Brassley, Richard SoffeACCOUNTING Christopher Nobes ADVERTISING Winston Fletcher AFRICAN AMERICAN RELIGION Eddie S. Glaude Jr AFRICAN HISTORY ... Hugh Bowden ALGEBRA Peter M. Higgins AMERICAN HISTORY Paul S. Boyer AMERICAN IMMIGRATION David A. Gerber AMERICAN ...