Ion Impantation Technology: 16th International Conference on Ion Implantation Technology; IIT 2006
- ISBN-10
- 0735403651
- ISBN-13
- 9780735403659
- Category
- Science
- Pages
- 664
- Language
- English
- Published
- 2006-12-04
- Publisher
- American Institute of Physics
- Authors
- Andy Smith, Karen J. Kirkby, Russell Gwilliam
Description
This is the premier world conference for the presentation of the latest advances in ion implantation, from the fundamentals of ion-solid interactions to manufacturing implant equipment. All papers were peer-reviewed. Ion implantation is used to manufacture semiconductor devices. Materials properties are changed by bombarding wafers with atoms, which are accelerated in an ion implanter.
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