Optical Characterization in Microelectronics Manufacturing
- ISBN-10
- 0788115391
- ISBN-13
- 9780788115394
- Category
- Semiconductors
- Pages
- 34
- Language
- English
- Published
- 1994-06-01
- Authors
- S. Perkowitz, David G. Seiler, W. M. Duncan
Description
Covers ellipsometry, infrared spectroscopy, optical microscopy, modulation spectroscopy, photoluminescence and raman scattering. Bibliography.
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