This book introduces contamination control in a comprehensive manner. It covers the basics for the beginner, and delves in depth into the more critical issues of process engineering and circuit manufacturing for the more advanced reader. The reader will begin to see how the puzzle of contamination control comes together and to focus on the fundamentals required for excellence in modern semiconductor manufacturing.
What makes the area of contamination control unique is its ubiquitous nature, across all facets of semiconductor manufacturing. Clean room technology, well recognized as a fundamental requirement in modern day circuit manufacturing, barely scratches the surface in total contamination control. This handbook defines and describes most of the major categories in current contamination control technology.
IBM Vice President and This book describes the process ofdefect re of Technology Products General Manager duction in the microelectronics world.
This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing.
Nondestructive Evaluation Joseph S. Heyman. Other Noyes Publications HANDBOOK OF CONTAMINATION CONTROL IN MICROELECTRONICS ... handbook is a broad review of semiconductor materials and Handbook of Contamination Control in Microelectronics.
Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III
... HANDBOOK OF CONTAMINATION CONTROL IN MICROELECTRONICS Principles, Applications and Technology Edited by Donald L. Tolliver Motorola, Inc. Contamination control technology is now a prerequisite of modern electronics. This has not always ...
Greiner , J. , Grant , L. , Huffman , T. , and Patel , W. , Designing a High Performance , Low Energy Cost Cleanroom : A Case Study , Cleanrooms , p . 14 , January 1992 . Hauenstein , L. R. , Cosmetics in the Cleanroom ...
... Second Edition: edited by Krishna Seshan HANDBOOK OF VACUUM ARC SCIENCE AND TECHNOLOGY: edited by Raymond L. Boxman, Philip J. Martin, and David M. Sanders HANDBOOK OF VLSI MICROLITHOGRAPHY, Second Edition: edited by John N. Helbert ...
Japan currently holds 90% of the market, and this book outlines opportunities in the former Soviet Union, where companies with the necessary technology are seeking partners, investment, and manufacturing opportunities.
In Proceedings of International Intersociety Electronic and Photonic Packaging Conference (INTERpack '97), 113–7. ... “Sensitivity Analysis of Multiconductor Transmission Lines and Optimization for High-Speed Interconnect Circuit Design ...
... Philip J. Martin, and David M. Sanders HANDBOOKOF VLSI MICROLITHOGRAPHY, Second Edition: edited by John N. Helbert HIGH DENSITY PLASMA SOURCES: edited by Oleg A. Popov HYBRID MICROCIRCUITTECHNOLOGY HANDBOOK,Second Edition:by James ...