Selected Papers on Optical Methods in Surface Metrology

Selected Papers on Optical Methods in Surface Metrology
ISBN-10
0819423475
ISBN-13
9780819423474
Category
Technology & Engineering / Optics
Pages
638
Language
English
Published
1996
Publisher
SPIE Optical Engineering Press
Author
David J. Whitehouse

Description

Topics in this volume include: comparison of interferometric contouring techniques; comparison of visibility of standard scratches; and near-grazing illumination and shadowing of rough surfaces.

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