Micromachining Technology for Micro-optics and Nano-optics
- ISBN-10
- 0819452556
- ISBN-13
- 9780819452559
- Pages
- 330
- Language
- English
- Published
- 2004
- Publisher
- SPIE
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Other editions
-
- 2003
- 262 pages
- Paperback
- Society of Photo Optical