High Purity Silicon VII: Proceedings of the International Symposium
- ISBN-10
- 156677344X
- ISBN-13
- 9781566773447
- Category
- Crystal growth
- Pages
- 406
- Language
- English
- Published
- 2002
- Publisher
- The Electrochemical Society
- Author
- Cor L. Claeys
Description
Electron Devices , 48 , 2043 ( 2001 ) . ... [ 11 ] A. Poyai , E. Simoen , C. Claeys , R. Rooyackers and A. Redolfi , in Microelectronics Technology and Devices – SBMicro 2002 , N.I. Morimoto , R.P. Ribas , and P. Verdonck , Editors , PV ...
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