Physics and Technology of High-k Gate Dielectrics 5
- ISBN-10
- 1566775701
- ISBN-13
- 9781566775700
- Category
- Dielectrics
- Pages
- 660
- Language
- English
- Published
- 2007-01-01
- Publisher
- The Electrochemical Society
- Author
- Samares Kar
Description
This issue covers in detail all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, high dielectric constant materials, processing, metals for gate electrodes, interfaces, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.
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