Microelectronics Technology and Devices - SBMicro 2008
- ISBN-10
- 1566776465
- ISBN-13
- 9781566776462
- Category
- Microelectronics
- Pages
- 661
- Language
- English
- Published
- 2008-08
- Publisher
- The Electrochemical Society
- Author
- Jacobus W. Swart
Description
The SBMicro symposium is a forum dedicated to fabrication and modeling of microsystems, integrated circuits and devices. The goal of the symposium is to bring together researchers in the areas of processing, materials, characterization, modeling and TCAD of integrated circuits, microsensors, microactuators and MEMS. This issue of ECS Transactions contains the papers presented at the 2008 conference.
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