Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications

Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications
ISBN-10
1566778638
ISBN-13
9781566778633
Category
Integrated circuits
Pages
377
Language
English
Published
2011-04-25
Publisher
The Electrochemical Society
Author
F. Roozeboom

Description

This issue of ECS Transactions covers emerging materials, process and technology options for large-area silicon wafers to enhance advanced IC performance or to enable revolutionary device structures with entirely new functionalities. Topics : high-mobility channel materials, (e.g. strained Si/Ge, compound semiconductors and graphene), high-performance gate stacks and low-resistivity junctions and contacts on new, Si-compatible materials; new materials and processes for 3-D (TSV) integration ; synthesis of nano-structures including wires, pores and membranes of Si-compatible materials; novel MEMS/NEMS structures and their integration with the mainstream Si-IC technology.

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