Ultra Clean Processing of Semiconductor Surfaces XIV: 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018)...
- ISBN-10
- 3035714177
- ISBN-13
- 9783035714173
- Category
- Semiconductors
- Language
- English
- Published
- 2018
- Authors
- Paul Mertens, Marc Heyns, Marc Meuris
Description
The 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018, Leuven, Belgium, September 3-5, 2018) was organized by IMEC and the scope of this symposium includes all issues related to contamination, cleaning and surface preparation in mainstream large-scale Integrated Circuit manufacturing. This collection will be interesting and useful for experts in the field of microelectronics. Microelectronics, Semiconductors, Surface Cleaning, Surface Functionalization, Particle Removal, Etching, Wetting Drying, Pattern Collapse, Interconnects, Contamination Materials Science.
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